项目名称： 基于显微差分反射光谱技术的有机薄膜制备在线检测方法研究

项目编号： No.11504201

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 数理科学和化学

项目作者： 张雷

作者单位： 山东大学

项目金额： 22万元

中文摘要： 有机半导体薄膜器件作为一种新型电子元件，具有质量轻、性能高、成本低等诸多优点，已经在能源、信息、材料等领域表现出巨大的应用潜力和实用价值，但稳定性差和使用寿命短等问题制约了它的进一步发展和应用。如何在线的检测和控制有机薄膜器件的质量成为了目前研究的热点，无论是科学上的机理研究还是工业上的工艺优化，对有机薄膜原位实时检测技术提出了更高的要求。本课题以实现有机半导体薄膜器件制备在线检测技术为目标，设计新型的显微差分反射光谱检测方案，综合采用双光束补偿技术、共聚焦技术和多通道宽光谱采集技术，解决有机薄膜器件难以在线检测的难题，克服了扫描电镜、扫描探针显微镜等测试手段必须中断制备过程、甚至对薄膜制备造成影响的弊端。在此基础上，研究高性能有机半导体薄膜器件的制备工艺，这将有助于有机薄膜制备工艺的优化，为有机薄膜器件的大规模应用奠定基础，也为传统的光谱技术在微纳米和新材料领域的研究拓展了新的应用空间。

中文关键词： 差分反射光谱；显微光谱；有机薄膜；在线检测；真空环境

英文摘要： The organic semiconductor thin film devices, as a new type of electronic components, have exhibited great potential and industrial value in the field of energy, information and materials for their characteristics of light weight, high performance, low cost and so on. But the poor stability and damageable behavior restricts its extensive use. How to detect and control the quality of organic thin film devices online has attracted widely attention. Both scientific research and industrial application put forward higher requirements for the online detection of organic thin film growth. Therefore, this application focuses on the design of the new technique of microscopic differential reflectance spectroscopy, using multi-techniques of dual-beam compensation, confocal technique and multi-channel spectroscopy and new microscopic spectral processing algorithms, which is expected to investigate the fabrication of organic thin film devices online. In addition, it avoids some disadvantage of SEM and STM, which need to discontinue or damage the film growth during the detection. Moreover, this technology will help to optimize the organic thin films preparation process. It is expected to solve the stability problems of the organic thin film structure and device from the fabrication process, which establishes the basis of industrialized applications. This technology will expand new applications with traditional spectroscopy in micro-nano field and the field of advanced materials.

英文关键词： differential reflectance spectroscopy;microscopic spectroscopy;organic thin films;in-situ investigation;vacuum environment