项目名称： 光学微透镜结构自由曲面的塑性域镜面磨削技术研究

项目编号： No.61475046

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 谢晋

作者单位： 华南理工大学

项目金额： 80万元

中文摘要： 光学自由曲面附加微透镜结构可产生更宏观的微光学特性，但是，高性能的光学部件及其成型模芯为单晶碳化硅、石英玻璃、碳化硅陶瓷等硬脆性材料，多轴机械运动会引起微加工的脆性破坏。因此，提出采用气中放电修锐修齐的粗金刚石砂轮微轮廓，利用机器视觉和超声波振动控制微轮廓上的微磨粒切削刃和无脆性破坏的塑性域切削状态，实现高效率、高精度的微光学镜面磨削，代替效率低、有污染的游离磨粒抛光。问题是：在多轴微磨削中，脆/塑性域磨粒切削状态如何转变？微磨粒切削刃如何被机器识别？为此，研究超声波振动下磨粒切削刃参数与塑性域切削的作用机制，微磨粒切削刃特征化识别模式，放电参数、磨粒切削刃参数与多轴运动间的协同控制等。旨在自主研发出微透镜结构自由曲面的多轴镜面磨削技术，开发应用于立体显示器、发光芯片、光伏电池等的微光学部件原型。最终，解决光学加工长期受限于人工经验的问题，为洁净、智能的微光学制造装备提供关键技术。

中文关键词： 自由曲面；微透镜阵列；光学加工；微光学；镜面磨削

英文摘要： The optical freeform surface patterned by microlens structure may produce more macroscopic micro-optical properties, but the high-performance optical component and its core insert are hard and brittle material such as single-crystal SiC, quartz glass, SiC ceramics and so on. Hence, the dry ED (Electro Discharge) dressed and truncated micro-profile of coarse diamond grinding wheel is proposed to realize efficient and accurate micro-optical mirror grinding by controlling many micro-grain cutting edges on micro wheel profile and brittle-crack-free ductile-mode cutting through machine vision and ultrasonic vibration. It is to replace the inefficient and polluted dissociated-abrasive polishing. The issues to be resolved are how to change brittle-mode cutting to ductile-mode cutting for micro-grains and how to recognize the micro-grain cut edges by machine. Accordingly, this research includes the influence of grain cutting parameters on ductile-mode grinding under ultrasonic vibration, the recognition mode of grain cutting edges on micro wheel profile, the synergic control of ED variables, grain cutting parameters and multi-axis movement and so on. The objective is to develop multi-axis mirror grinding technique of micro-lens structured freeform surface, and create the prototypes of micro-optical components for the applications of 3D displayers, light-emitting chip, photovoltaic cell and so on. It is also to solve the long-term issue of optical machining limited to artificial experience and offer the key technology for clean and intelligent micro-optical manufacture equipment.

英文关键词： Freeform surface;Microlens array;Optic machining;Micro optics;Mirror grinding