Integrated micro power generators are crucial components for micro robotic platforms to demonstrate untethered operation and to achieve autonomy. Current micro robotic electrostatic actuators typically require hundreds to thousands of voltages to output sufficient work. Pyroelectricity is one such source of high voltages that can be scaled to small form factors. This paper demonstrates a distributed pyroelectric high voltage generation mechanism to power kV actuators using alternating exposure of crystals to hot and cold water (300C to 900C water temperature). Using this fluidic temperature control, a pyroelectrically generated voltage of 2470 V was delivered to a 2 pF storage capacitor yielding a 6.10 {\mu}J stored energy. A maximum energy of 17.46 {\mu}J was delivered to a 47 pF capacitor at 861 V. The recirculating water can be used to heat a distributed array of converters to generate electricity in distant robotic actuator sections. The development of this distributed system would enable untethered micro-robot to be operated with a flexible body and free of battery recharging, which advances its applications in the real world.

翻译：集成微功率发生器是实现微机器人平台无束缚运行与自主性的关键组件。当前微机器人静电驱动器通常需要数百至数千伏电压以输出足够功。热释电效应是一种可小型化的高压生成方式。本文展示了一种分布式热释电高压生成机制，通过晶体交替暴露于冷热流体（水温300°C至900°C）为千伏级驱动器供能。利用该流体温控方法，向2 pF储能电容器输送了2470 V热释电生成电压，获得6.10 μJ存储能量。向47 pF电容器在861 V电压下输送的最大能量达17.46 μJ。循环流体可用于加热分布式转换器阵列，在远端机器人驱动单元发电。该分布式系统的开发将使无束缚微机器人具备柔性机身且无需电池充电，推动其在实际场景中的应用。