项目名称： 还原氧化石墨烯及其复合材料的气敏性能与硅基集成微气体传感器的研究

项目编号： No.61474012

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 李晓干

作者单位： 大连理工大学

项目金额： 83万元

中文摘要： )：研究开发满足未来高灵敏度、高选择性、高集成化需求的气敏材料及传感器是气体传感器领域研究的重要课题。本项目以还原氧化石墨烯为研究对象，从材料结构修饰和微热板阵列传感器加工两方面入手，探索有效提高还原氧化石墨烯材料的气敏性、响应恢复速度、选择性的科学方法。研究内容包括：系统研究具有不同含氧功能团浓度的还原氧化石墨烯，以及它与不同金属氧化物/有机聚合物组成的功能化复合敏感材料，探索该类气敏材料的气敏性能和响应机理，进而改善传感器的响应恢复特征和提高气体选择性；研究基于还原氧化石墨烯的半导体集成微气体传感器阵列，探索还原氧化石墨烯与硅基微热板的集成技术，以提高选择性和响应恢复速度为目标深入研究微热板的控温方式，为研究开发出具有高灵敏度、高选择性和具有良好响应恢复性能的实用化半导体集成微气体传感器奠定科学与技术基础。

中文关键词： 气敏材料；还原氧化石墨烯；微气体传感器；硅基微热板

英文摘要： Development of the highly sensitive、highly selective and highly integaratable sensing materials are very crucial for the reliable gas sensors. The reduced 2D graphene oxide (rGO) functionalized by the oxygen containing groups has better desirable gas sensing properties. However, the gas sensing properties such as the response/recovery features and selectivity need further improving.In this proposal, various methods will be employed to obtain the rGO with different concentrations of the oxygen containing species. Through studying the influence of these oxygen containing species and the metal oxide/polymer dopants on the electrical and sensing properties of the rGO, the possible method for improving the sensing properties will be researched and the possible mechanism will be explored and proposed. Further, the integration of the optimized rGO with the Si-based microhoplate using microfluidic technology will be investigated. The sensor array will be studied to improve the seletivity of the sensor together with the advantages of the temperature modulation offered by microhotplates.

英文关键词： Sensing materials;Micro- gas sensors;reduced graphene oxide;Si-based microhoplate