项目名称： 基于电子束双源共蒸的“无界面”高功率激光薄膜技术

项目编号： No.61505227

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 朱美萍

作者单位： 中国科学院上海光学精密机械研究所

项目金额： 20万元

中文摘要： 与传统多层膜中离散界面密切相关的分层剥落损伤是一种“灾难性”的损伤，也是目前限制高功率激光反射膜元件的功能性激光损伤阈值进一步提升的“瓶颈”问题。因此，攻克传统多层膜中离散界面引起的相关问题，以期实现高功率激光反射膜元件功能性损伤阈值的突破性提升，已经成为激光薄膜领域在国际上最受关注的热点研究课题之一。针对传统多层膜的离散界面问题，本项目拟设计一种“无界面”多层膜，即通过连续改变两种镀膜材料交替时两种材料的混合比例，形成具有连续过渡区的“无界面”多层膜。基于电子束双源共蒸技术研究“无界面”多层膜的制备；通过连续过渡界面取代传统多层膜的离散界面实现“无界面”多层膜；认识和理解“无界面”多层膜的损伤机制。本项目将有望解决离散界面诱导薄膜元件在激光辐照下产生的“灾难性”损伤问题，为未来突破性提升高功率激光反射膜元件的抗激光损伤能力提供一种潜在选择。

中文关键词： 光学介质薄膜；激光损伤；损伤阈值；多层膜；薄膜技术

英文摘要： The delamination damage morphology closely related to the discrete interface in the traditional coating is catastrophic, and it is now the bottleneck which limits the further improvement of laser induced damage threshold of high reflection coating. Hence, overcoming the problems caused by the discrete interface has become one of the world widely interested research topics in the field of laser coating. In this project, we intend to design a non-interfacial multilayer coating, in which there is a continuous transition zone between two different coating materials. The transition zone is achieved by continuously changing the mixing ratio of the two coating materials. The preparation, as well as the damage mechanism of the “non-interfacial” multilayer coating, will be studied. Replacing the discrete interface in the traditional coating by a continuous transition zone, is expected to solve the catastrophic damage caused by discrete interface, and provide a potential option for achieving a breakthrough in enhancing the functional damage threshold of high reflection coating.

英文关键词： Optical dielectric coating;Laser induced damage;Laser induced damage threshold;Multilayer coating;Thin film technology