Laser-induced breakdown spectroscopy (LIBS) faces challenges in high-accuracy quantitative measurement under few-shot scenarios due to spectral noise and data scarcity. Traditional preprocessing methods often fail to preserve subtle spectral features or capture nonlinear correlations. This work proposes a standardized processing pipeline integrating diffusion-based denoising, attention-based autoencoder for dimensionality reduction, group shuffling data augmentation, and ordinary least squares regression. The diffusion module employs a 3D UNet architecture to remove spectral noise while preserving essential emission features. The attention-autoencoder captures nonlinear spectral correlations, effectively reducing high-dimensional spectral data to compact latent representations. Group shuffling data augmentation enhances model robustness by creating synthetic samples through feature group permutation. Experimental results on multiple elemental concentrations demonstrate that our Diffusion-DA-AE pipeline achieves superior performance with a mean RMAE of 0.2847, representing 37.7\% and 37.6\% improvements over baseline autoencoder and traditional PCA-PLS regression, respectively. The framework's effectiveness validates its generalizability and establishes a new benchmark for few-shot LIBS regression.

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