Micro scanning mirrors (MSM) extend the range and field of view of LiDARs, medical imaging devices, and laser projectors. However, a new class of soft-hinged MSMs contains out-of-plane translation in addition to the 2 degree-of-freedom rotations, which presents a cabliration challenge. We report a new calibration system and algorithm design to address the challenge. In the calibration system, a new low-cost calibration rig design employs a minimal 2-laser beam approach. The new new algorithm builds on the reflection principle and an optimization approach to precisely measure MSM poses. To establish the mapping between Hall sensor readings and MSM poses, we propose a self-synchronizing periodicity-based model fitting calibration approach. We achieve an MSM poses estimation accuracy of 0.020{\deg} with a standard deviation of 0.011{\deg}.

翻译：微扫描镜（MSM）可扩展激光雷达、医学成像设备和激光投影仪的作用范围与视场角。然而，新型柔性铰链微扫描镜在具有二自由度旋转特性的同时，还包含面外平移分量，这带来了标定挑战。本文提出了一种新型标定系统与算法设计以解决该问题。在标定系统中，我们设计了一种采用最小化双激光束方案的低成本标定装置。新算法基于反射原理与优化方法，实现对微扫描镜姿态的精确测量。为建立霍尔传感器读数与微扫描镜姿态之间的映射关系，我们提出了一种基于自同步周期性的模型拟合标定方法。最终实现了0.020°的微扫描镜姿态估计精度，标准差为0.011°。