In this study, we proposed a design methodology for a piezoelectric energy-harvesting device optimized for maximal power generation at a designated frequency using topology optimization. The proposed methodology emphasizes the design of a unimorph-type piezoelectric energy harvester, wherein a piezoelectric film is affixed to a singular side of a silicon cantilever beam. Both the substrate and the piezoelectric film components underwent concurrent optimization. Constraints were imposed to ensure that the resultant design is amenable to microfabrication, with specific emphasis on the etchability of piezoelectric energy harvesters. Several numerical examples were provided to validate the efficacy of the proposed method. The results showed that the proposed method derives both the substrate and piezoelectric designs that maximize the electromechanical coupling coefficient and allows the eigenfrequency of the device and minimum output voltage to be set to the desired values. Furthermore, the proposed method can provide solutions that satisfy the cross-sectional shape, substrate-depend, and minimum output voltage constraints. The solutions obtained by the proposed method are manufacturable in the field of microfabrication.

翻译：本研究提出了一种采用拓扑优化技术、针对特定频率下最大化发电功率的压电能量收集装置设计方法。该方法重点设计了单压电晶片型压电能量收集器，其中压电薄膜附着在硅悬臂梁的单侧。基底层和压电薄膜组件均进行了同步优化。通过施加约束条件确保最终设计方案适用于微加工制造，特别强调了压电能量收集器的可腐蚀性要求。通过多个数值算例验证了所提方法的有效性。结果表明：该方法能够同时推导出最大化机电耦合系数的基底与压电结构设计方案，并可将器件的固有频率与最小输出电压设定为期望值。此外，该方法可提供满足截面形状约束、基底相关约束及最小输出电压约束的解决方案。通过该方法获得的解在微加工领域具有可制造性。