Large language models (LLMs) have demonstrated remarkable capabilities across a wide range of tasks. However, even the most advanced open-source LLMs, such as the LLaMA family models, still face challenges when it comes to accurately solving complex multi-step mathematical problems. In this paper, we present an innovative process-oriented math verifier called \textbf{Math-Shepherd}, which assigns a reward score to each step of the LLM's outputs on math problems. The training of Math-Shepherd is achieved using automatically constructed process-wise supervision data, breaking the bottleneck of heavy reliance on manual annotation in existing work. With the guidance of Math-Shepherd, a series of open-source LLMs demonstrate exceptional performance. Among them, DeepSeek 67B \citep{DeepSeek-llm} stands out by achieving accuracy rates of 93.3\% on the GSM8K dataset and 48.1\% on the MATH dataset, without external enhancement such as tool usage. Our Math-Shepherd also outperforms the self-consistency method and other existing verification models. We believe that automatic process supervision holds significant potential for the future evolution of LLMs.

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