项目名称： 基于锑化物超晶格的热电结构及其器件研究

项目编号： No.61474115

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 王晓东

作者单位： 中国科学院半导体研究所

项目金额： 100万元

中文摘要： 热电器件具有结构简单、可靠性高、无污染、可微型化等特点，一直是国内外研究热点。本项目拟开展基于锑化物二类超晶格的热电结构及其器件研究。通过分子束外延技术制备具有高热电优值系数的锑化物二类超晶格材料，利用标准半导体工艺技术如干法刻蚀、电子束曝光及激光直写等技术制备良好性能的热电器件，探索该类器件与其他III-V族器件的集成技术，并阐明锑化物二类超晶格热电物理机制。本项目的创新性在于选取锑化物二类超晶格这种不同于传统热电材料的新型材料来研制热电结构及其器件。涉及到新型热电材料外延技术、工艺开发与集成、物理机制等关键科学问题。对于锑化物超晶格以往的研究多集中在其红外性能，在热电方面的研究并不多见；本项目的实施不仅可以探索锑化物超晶格这类新的热电结构及其机理，而且可以拓展热电材料体系，特别是低温热电材料；对新材料体系在相关芯片及系统方面的应用也有积极的促进作用。

中文关键词： 超晶格；锑化物；热电器件；热电优值

英文摘要： Thermoelectric devices have been widely studied for their advantages such as solid-state stable operation, zero-radiation, pollution-free, long operating lifetime and miniaturization. This project plans to study thermoelectric structures and devices of Sb based Type II superlattices. Thermoelectric structures with high ZT value are to be grown by molecular beam epitaxy, and devices with good thermoelectric performance are fabricated by using standard semiconductor processes such as dry etch, electron beam lithography and laser direct writing. Integration with other III-V devices will be developed. New physics behind thermoelectric characteristics is to be explored. The novelty of this proposal is selecting Sb based Type II superlattices as research subject, including their epitaxy techniques, process development, device integration and physics behind, which are different from the traditional thermoelectric materials. Nowadays most of the studies on Sb based Type II superlattices are about the infrared characteristics and there is little work on the thermoelectrics. Our research will not only develop the fabrication technique of this kind of thermoelectric nanostructures and devices, explain the thermoelectric physics, but also add new materials to current low temperature thermoelectrics. Our project can promote the application of new materials to the integration of the thermoelectric devices to a chip or a system.

英文关键词： Superlattices;Sb based;Thermoelectric devices;ZT