项目名称： 硅基III-V族自卷曲微米管的可控制备及单片集成硅基光源的研究

项目编号： No.61474008

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 王琦

作者单位： 北京邮电大学

项目金额： 80万元

中文摘要： 近年来，硅基应变半导体薄膜自卷曲形成的微米管已经在光电子领域展现出广阔的应用前景。随着硅基微纳光子学的快速发展，研制基于此类半导体自卷曲微米管的新型硅基有源光子集成器件（特别是低阈值纳米尺度激光器），对于构建满足高密、高速率应用的硅基微纳光子互连芯片尤为重要。本项目拟在高质量GaAs/Si异变外延生长方面取得重要突破，进而利用单晶Si或SOI衬底上异变外延生长的直接带隙III-V族应变薄膜，开展硅基III-V族自卷曲微米管及相关单片集成硅基光源的创新研究。本项目研究工作重点集中在：（1）通过制管方法与工艺的深入探索和创新，实现硅基III-V族自卷曲微米管及其阵列的高效、可控制备；（2）通过在管壁中插入自组织量子点增益介质，实现低阈值硅基III-V族量子点微米管激光器。本项目研究成果将对硅基光子集成技术与硅基微纳光子互连技术的发展、新型硅基III-V族微纳光子器件的研制具有非常重要的意义。

中文关键词： 硅基光子学；IIII-V族微米管；自卷曲；量子点；异变外延

英文摘要： Recently, microtubes formed by the self-rolling of Si-based strained semiconductor membranes have shown the wide application prospects in optoelectronic field. With the rapid development of silicon-based micro/nano photonics, the development of novel Si-based active integrated photonic devices, especially low-threshold nanoscale lasers, which are based on these semiconductor microtubes, has played an important role in building silicon-based micro/nano optical interconnect chip. In this project, important breakthroughs will be achieved in high-performance III-V/Si metamorphic growth. And then, using III-V strained membranes with direct-bandgap which have been metamorphically grown on single-crystal Si or SOI substrate, innovative researches on Si-based III-V self rolled-up microtubes and corresponding photonic devices will be carried out. Our research work will focus on the following aspects. (1) Highly-effective and controllable fabrication of Si-based III-V self rolled-up microtubes and their arrays will be realized through the comprehensive investigations and innovations of tube fabrication method and processes; (2) Fabrication of Si-based III-V quantum dot microtube lasers with very low threshold will be realized through the insertion of self-assembled quantum dot gain media in the wall of microtubes. The research results achieved in this project will be important not only for the development of Si-based photonic integrated technologies and Si-based micro/nano optical interconnects technologies, but also for the fabrication of Si-based III-V micro/nano photonic devices.

英文关键词： Si-based photonics;III-V microtube;self-rolled-up;quantum dot;metamorphic growth