While Transformer-based autoregressive models excel in data generation, their token discretization strategy inherently limits their precision in continuous domains. We analyze the scalability limitations of existing discretization-based approaches for generating hybrid discrete-continuous sequences, particularly in high-precision domains such as logos, layouts, and semiconductor circuit designs, where precision loss potentially leads to visual artifacts, aesthetic degradation, and even functional failure. To address the challenge, we propose a novel unified framework that jointly models discrete and continuous values for variable-length sequences. Our approach employs a hybrid approach that combines categorical prediction for discrete values with diffusion-based modeling for continuous values, incorporating two key technical components: an end-of-sequence (EOS) logit adjustment mechanism that uses an MLP to dynamically adjust EOS token logits based on sequence context, and a length regularization term integrated into the loss function. Additionally, we present ContLayNet, a large-scale benchmark comprising 334K high-precision semiconductor layout samples with specialized evaluation metrics that capture functional correctness, where precision errors significantly impact performance. Experiments on multiple domains show that our approach achieves higher-fidelity hybrid vector representations than discretization-based and fixed-schema baselines, while effectively scaling to high-precision generation.

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