We report a new calibration system and algorithm design for micro scanning mirrors (MSMs) which are an important component in many active sensors used in robotic applications. In fact, our MSM is a 3 degree-of-freedom soft-hinged robot with a triaxial Hall sensor as feedback. Our calibration rig design employs a minimal 2-laser beam approach and the new algorithm builds on reflection principle to precisely measure MSM poses. To establish the mapping between Hall sensor readings and MSM poses, we propose a self-synchronizing periodicity-based model fitting calibration approach. We achieve an MSM poses estimation accuracy of 0.020{\deg} with a standard deviation of 0.011{\deg}.

翻译：我们报告了一种适用于微扫描镜(MSM)的新型标定系统与算法设计，该类器件是机器人应用中众多有源传感器的重要组件。实际上，我们的MSM是一个以三轴霍尔传感器作为反馈的三自由度软铰链式机器人。我们的标定装置采用最简双激光束方案，新算法基于反射原理精确测量MSM位姿。为建立霍尔传感器读数与MSM位姿之间的映射关系，我们提出了一种基于自同步周期性的模型拟合标定方法。最终实现的MSM位姿估计精度为0.020度，标准差为0.011度。