项目名称： 光学自由曲面的像散补偿型动态差分干涉检测技术研究

项目编号： No.61505080

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 袁群

作者单位： 南京理工大学

项目金额： 20万元

中文摘要： 光学自由曲面已在成像系统尤其是离轴反射式相机中得到了应用，对自由曲面面形的高精度检测技术提出了迫切的需求。自由曲面相对最佳拟合球面的偏差较大，经其反射后的测试光束具有较大的发散性，现有干涉测试技术还不成熟。本项目提出采用像散补偿型动态差分干涉检测光学自由曲面，将同步移相与横向剪切干涉相结合，采用斜入射方式补偿自由曲面面形中的像散成分，控制光束的发散性。项目主要研究内容包括：(1)等光程型动态差分干涉检测光路的方案设计与实验构建；(2) 像散补偿型测试光路中自由曲面倾斜角度的最优化求解；(3) 基于Zernike多项式的波面传输模型与成像畸变校正；(4)像散补偿型动态差分干涉检测系统建模与自由曲面面形重构。本项目的开展将解决光学自由曲面检测的关键基础性问题，完善光学自由曲面纳米级准确度的干涉测量方案，全方位指导光学自由曲面的设计、加工、检测与装配，促进自由曲面在更多基础领域的应用。

中文关键词： 干涉检测；光学自由曲面；非零位；补偿法

英文摘要： Freeform optics has been used in imaging optical systems especially for those in off-axis reflective style, which raises urgent demand for the high precision metrology for surface figure of freeform optics. The test beam reflected from the freeform optics is strongly diverged due to its high departure from the best fit sphere, so the research on interferometric technique for freeform optics is still limited currently. In this project, the astigmatism-corrected dynamic differential interferometry is proposed, which combines simultaneous phase-shifting with lateral shearing interferometry, while oblique incidence is taken to compensate for the astigmatism in the surface figure of freeform optics to constrain the divergence of the test beam. The research includes: (1) optical design and building up of the dynamic differential interferometric system with equal optical paths for the two interference beams; (2) the optimal solving of the tilt angle of the freeform surfaces for astigmatism compensation; (3) the wavefront propogation model based on Zernike polynomials representing the slopes and the corresponding calibration algorithm of mapping distortion; (4) reconstructing of the surface figure of freeform optics based on the model building of the dynamic differential interferometric system. The development of this project will solve some of the key but basic problems for freeform metrology, make improvement on the metrology aiming at the accuracy of nanometer, and afterwards comprehensively guide the design, fabrication, metrology and assembly of freeform optics,which will prompt the wide application of freeform optics in more areas.

英文关键词： interferometry;freeform optics;non-null;compensation