项目名称： 基于微结构边际效应的SPP超分辨光刻技术研究

项目编号： No.61475159

项目类型： 面上项目

立项/批准年度： 2015

项目学科： 无线电电子学、电信技术

项目作者： 董小春

作者单位： 中国科学院光电技术研究所

项目金额： 80万元

中文摘要： 以课题组前期发展的多种SPP光刻技术为基础，以形成超分辨纳米结构的快速大面积SPP光刻技术与工艺为目标，以构造具有大面积、高抗损伤能力的实用化SPP边际光刻系统为准则，通过分析现有SPP光刻技术的优势和不足，并基于课题组发现的SPP边际效应，本项目提出发展SPP边际光刻技术与系统的思路与方法。首先，研究金属微纳结构边际对入射光波位相、强度及偏振特性的调制规律，建立不同形式（圆球顶端边际、矩形侧边、梯形侧边边际等）边际结构对电磁波调控的物理模型；探索微纳结构边际在金属银层表面激发表面等离子体波的物理机制，获得能够高效激发、局域、增强表面等离子体波的SPP边际结构设计方法，形成实用化的高分辨力SPP边际光刻模板制备工艺。构建SPP边际光刻实验系统，开展各种复杂纳米图形的SPP边际光刻超分辨实验，完成包括亚波长结构滤波器在内的几种典型功能器件制备。

中文关键词： 微纳结构；边际效应；SPP边际光刻；超分辨光刻

英文摘要： Taking the analysis of prior research on several SPP lithography technologies in our group as a basis and the merits and drawbacks of current SPP lithography technology, a novel SPP lithography technology based on edge effect discovered in our prior work is proposed in this project, which can manufacture large-area and super-resolution nano-structure fast and efficiently. In the project, the control rule of metallic micro-structure edge to the amplitude, phase and polarization of incident light will be researched. Then the physical model of different shaped edges with electromagnetic wave will be constructed. We will research the SPP on the silver layer which is excited by micro-structure edges, in order to excite, localize and increase SPP effectively, and propose a process of edge-effect mask using in super-resolution SPP lithography at last. After the construction of edge-effect SPP lithography system, kinds of complex nano-patterns will be manufactured, which can form several functional devices.

英文关键词： Nanostructure;Edge Effect;SPP Edge lithography;Super resolution Lithography