Photolithography control system (PCS) is an extremely complex distributed control system, which is composed of dozens of networked microprocessors, hundreds of actuators, hundreds of thousands of sensors, and millions of lines of code. Cyber-physical system (CPS), which deeply merges computation with physical processes together, copes with complex system from a higher level of abstraction. PCS is a representative CPS. This work points out that thinking under the framework of CPS, which includes holistic perspective, model-based design, hardware/software co-design and continuous integration, could solve the issues presented in the current PCS. Although the traditional embedded system approach and the CPS approach would be coexisting in the PCS for a long time, the CPS approach is definitely the future of the PCS development.

翻译：光刻控制系统（PCS）是一个极其复杂的分布式控制系统，由数十个联网微处理器、数百个执行器、数十万个传感器以及数百万行代码组成。信息物理系统（CPS）将计算与物理过程深度融合，从更高抽象层次处理复杂系统。PCS是CPS的典型代表。本文指出，在CPS框架下进行思考——包括整体视角、基于模型的设计、软硬件协同设计以及持续集成——能够解决当前PCS中存在的问题。尽管传统嵌入式系统方法与CPS方法将在PCS中长期共存，但CPS方法无疑是PCS发展的未来方向。