项目名称： 基于容性耦合行波电极的硅基电光调制器的研究

项目编号： No.61505198

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 丁建峰

作者单位： 中国科学院半导体研究所

项目金额： 20万元

中文摘要： 硅基光互连技术具有高集成度、低功耗、与CMOS工艺兼容的特点，是唯一能适用于超短距离传输的片上光互连的技术。硅基电光调制器作为硅基光子学通信链路中电光信号转换的重要器件，其性能直接影响了整个链路的通信质量，因而成为硅基光子学领域中的研究热点。. 本项目针对现有硅基电光调制器的调制深度较低的问题，拟通过设计一种采用容性耦合行波电极的并联式硅基差分电光调制结构，使得单个驱动信号以相反的相位无分压地同时调制两个相移臂，从而达到提高调制深度的目的。容性耦合行波电极采用分布电容结构，将输入高速调制电信号耦合到相移臂的PN结上；同时对后端的直流偏置网络进行隔直，以保证器件能够在反向偏置的条件下正常工作。在前期研究基础的支撑下，有望使硅基电光调制器在50Gbps的工作速率下，光学偏置点位于正交点时，动态消光比仍然能够达到10dB，从而提高基于硅基光子学技术的通信链路的性能。

中文关键词： 硅基电光调制器；硅基微纳波导；行波电极

英文摘要： Silicon photonics has the advantages of high integration, low power consumption and the compatibility with CMOS process. It is the only candidate for the future on-chip optical interconnection. Silicon optical modulator, which transforms the electrical signal into the optical signal, directly determines the quality of the communication link and becomes the hotspot of silicon photonics.. As the modulation depth of the current silicon optical modulator is relatively low, a differential silicon optical modulator adopting the capacitively-coupled travelling-wave electrode is designed to solve this problem. Then the single driving voltage can simultaneously modulate the two arms without any loss, while the phases of the electrical signals on the two arms are opposite. The capacitively-coupled travelling-wave electrode utilizes the distributed capacitor to couple the driving signal to the PN junction. Meanwhile, in order to make the PN junctions reversely biased, the distributed capacitor is also used to block the DC power from the AC network. This design can make the silicon optical modulator has an extinction ratio of 10 dB at a speed of 50 Gbps, when the device is optically biased at the quadrature point. Then the improved silicon optical modulator will improve the performance of the communication link based on silicon photonics.

英文关键词： silicon optical modulator;silicon submicron waveguide;travelling-wave electrode