A compact large-range six-degrees-of-freedom (six-DOF) parallel positioning system with high resolution, high resonant frequency, and high repeatability was proposed. It mainly consists of three identical kinematic sections. Each kinematic section consists of two identical displacement amplification and guiding mechanisms, which are finally connected to a limb. Each limb was designed with a universal joint at each end and connected to a moving stage. A computational model of the positioner was built in the ANSYS software package, hence, the input stiffness, output compliance, range, and modal analysis of the system were found. Furthermore, a monolithic prototype made of Acrylonitrile Butadiene Styrene (ABS) was successfully manufactured by the 3D-printing process. It was actuated and sensed by piezoelectric actuators (PEAs) and capacitive displacement sensors, respectively. Finally, the performances of this proposed positioner were experimentally investigated. The positioning resolution was achieved as 10.5nm {\times} 10.5nm {\times} 15nm {\times} 1.8{\mu}rad {\times} 1.3{\mu}rad {\times} 0.5{\mu}rad. The experimental results validate the behavior and capabilities of the proposed positioning system, and also verify the nanometer-scale spatial positioning accuracy within the overall stroke range. Practical applications of the proposed system can be expanded to pick-and-place manipulation, vibration-canceling in microsurgery/micro-assembly, and collaborative manipulators systems.
翻译:提出了一种紧凑型大行程六自由度并联定位系统,具有高分辨率、高谐振频率和高重复性。该系统主要由三个相同的运动支链组成,每个支链包含两个相同的位移放大与导向机构,最终连接至一个连杆。每个连杆两端均设计有万向铰,并与动平台相连。利用ANSYS软件包建立了定位器的计算模型,据此获得了系统的输入刚度、输出柔度、行程范围和模态分析结果。此外,采用3D打印工艺成功制造了由丙烯腈-丁二烯-苯乙烯(ABS)制成的单体样机。该样机分别通过压电驱动器(PEA)和电容位移传感器实现驱动与感知。最后,对所提出的定位器性能进行了实验研究。定位分辨率达到10.5nm×10.5nm×15nm×1.8μrad×1.3μrad×0.5μrad。实验结果验证了所提出定位系统的性能与能力,并确认了其在全行程范围内具有纳米级空间定位精度。该系统的实际应用可扩展至拾取与放置操作、显微手术/微装配中的振动消除,以及协作机械臂系统。