Ptychography involves a sample being illuminated by a coherent, localised probe of illumination. When the probe interacts with the sample, the light is diffracted and a diffraction pattern is detected. Then the probe or sample is shifted laterally in space to illuminate a new area of the sample while ensuring there is sufficient overlap. Far-field Ptychography occurs when there is a large enough distance (when the Fresnel number is much greater than 1) to obtain magnitude-square Fourier transform measurements. In an attempt to remove ambiguities, masks are utilized to ensure unique outputs to any recovery algorithm are unique up to a global phase. In this paper, we assume that both the sample and the mask are unknown, and we apply blind deconvolutional techniques to solve for both. Numerical experiments demonstrate that the technique works well in practice, and is robust under noise.
翻译:叠层成像中,样品被相干且局域的照明探针照射。当探针与样品相互作用时,光发生衍射并产生衍射图案。随后探针或样品在空间横向移动以照射样品的新区域,同时确保存在足够重叠。当距离足够大(菲涅尔数远大于1)时,可获取幅度平方傅里叶变换测量值,即远场叠层成像。为消除模糊性,采用掩膜确保任何恢复算法的输出在全局相位范围内唯一。本文假设样品与掩膜均未知,并应用盲反卷积技术对两者进行求解。数值实验表明,该方法在实际应用中表现良好且具有噪声鲁棒性。