项目名称： 高深径比微通道的飞秒激光空间光束整形加工方法研究

项目编号： No.51505505

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 机械、仪表工业

项目作者： 王聪

作者单位： 中南大学

项目金额： 20万元

中文摘要： 微通道是许多微型器件/系统的关键功能结构。应用在这些微型器件/系统的微通道具有直径尺寸小(微米尺度，甚至纳米尺度)、深径比高(数十或近百)和锥度小等特征。传统微通道的制备采用半导体工艺，但制备过程极其复杂且难以实现三维网络型微通道的加工，因此亟需探索新的制造方法。飞秒激光以其三维高精度加工的优势为复杂网络型微通道的制备提供了理想的工具，但在作用机理、质量保证、可重复性及加工效率等方面仍存在许多问题及挑战。基于此，本项目提出通过空间光束整形将飞秒激光高斯光束转变为贝塞尔光束，结合液体辅助烧蚀和化学刻蚀，实现在透明介质内高质量、高深径比微通道的高效率可控制备；建立飞秒激光与材料作用的多尺度模型，揭示被加工材料的结构演化、相变机理、去除机制及微通道的形成过程，为高效率地制备满足更高要求的微通道提供理论基础和技术储备。

中文关键词： 飞秒激光；空间光束整形；高深径比；微通道；多尺度建模

英文摘要： Microchannels are the key functional structures of many micro- devices/systems. The microchannels applied in these micro- devices/systems have a feature of small diameters (micrometer scale or even nanometer scale), high aspect ratio (several tens or up to a hundred), small taper, and so on. Traditionally, the semiconductor technology is used for the preparations of the microchannels. As the manufacturing process is very complex and it is difficult to prepare three-dimensional microchannels by using the traditional semiconductor technology, a novel method is crucial to be developed for the fabrication of microchannels. Due to the advantages of high flexible and three-dimensional high precision, femtosecond laser becomes an ideal option for the fabrication of microchannels. However, with the continuous requirements of extremely high quality and precision, there are still challenges and questions for the fabrication of microchannels by using femtosecond laser, such as ultrafast laser-material interactions mechanisms, high efficiency, selective and controllable fabrication, and so on. Based on these challenges and questions, this project proposes a new method for the fabrication of high quality and high aspect ratio microchannels in transparent materials by spatial shaping femtosecond laser Gaussian beam into Bessel beam combining with liquid-assistance and chemical etching. At the same time, the multiscale models are established to describe the nonlinear and nonequilibrium complex femtosecond laser-material interactions, including structure evolutions, phase change mechanisms, material ablation and formation of microchannels. The proposed project will provide theoretical basis and manufacturing techniques for the high efficiency fabrication of microchannels by femtosecond laser to meet the continuous requirements.

英文关键词： femtosecond laser;spatial beam shaping;high aspect ratio;microchannels;multiscale modelling