项目名称： 超常吸收纳米结构在光电探测器上理论与应用研究

项目编号： No.61504143

项目类型： 青年科学基金项目

立项/批准年度： 2016

项目学科： 无线电电子学、电信技术

项目作者： 周文超

作者单位： 中国科学院长春光学精密机械与物理研究所

项目金额： 20万元

中文摘要： 随着微纳米加工技术的发展，分析仪器逐渐朝着微型化、集成化和便携化方向发展，由于微流控芯片有望在微米尺度下实现样品的制备、分离、反应、检测等功能操作，现已成为目前分析仪器的重要研究方向和前沿。本项目针对目前微流控芯片内光学检测集成化、阵列化问题，采用纳米结构产生的表面等离子激元特性，设计一种可实现光电探测器高速、高效的纳米吸收结构。研究多周期光栅结构产生的表面等离子激元模式之间的干涉效应对吸收率的影响和多波长吸收结构的优化设计，并将所设计的纳米吸收结构集成于光电探测器之中，构建光生载流子与纳米吸收结构的三维模型，研究光生载流子的传输机理，并探讨结构参数、材料融合、声子辅助、线性缺陷等对光电探测器纳米吸收结构吸收增强的影响。通过对纳米加工工艺的优化，对纳米结构的表面形貌、粗糙度、缺陷等进行微观结构表征，寻找可实现探测器最大吸收和传输的最佳工艺条件，并最终在微流控芯片上对生物化学试剂进行测试。

中文关键词： 超常吸收；纳米结构；载流子输运；声子辅助；干涉

英文摘要： With the development of micro- and nano- fabrication technology, analysisinstruments withminiaturization, integration and portability are becoming a newtrend. Microfluidic chips can be integrated with the whole laboratory operation suchas sampling, separation, reaction, detection on a single microchip, so the research onthe microfluidic now represents the developing direction inanalysis instrumentsfield.To increase the integration and array of optical detection on microfluidic chip, this project will propose a novel absorption nanostructure integrated with the photodetectors. Based on the interference of surface plasmonpolaritons in multi-period, the influence of this phenomenon on the absorption will be studied. The optimal multi-wavelength absorption nanostructure will also be presented to integrate with the photodetector. And then we will carry out systematical research with theory and experimental method on the photoelectron transportation according to the 3D model of photoelectron and nanostructure we developed. The effects of the other factors such as structure parameters, materials, phonon-assisted absorption, anddefect on the absorption will be investigated in detailed. By optimizing the nanofabrication technology, we need find the optimal technological condition through measuring the surface and the structure. Eventually, the biological and chemical samples can be detected on the microfluidic chip.

英文关键词： Extraordinary absorption;nanostructure;Carrier transportation;phonon-assisted; Interference